Simulation studies of the extraction region from glow discharge ion sources

This paper studies the influence of various parameters and conditions on the performance of an ion-beam extraction system, the trajectories of the particles in the beam being simulated by a commercial software (SIMION 3D). Space-charge effects are accounted for and criteria allowing optimization of the system are proposed. Ion beam trajectories with and without space charge have been determined and, from the results, optimum extraction conditions have been deduced. Simulation of singly charged ion trajectories for a concave meniscus with 3.5 mm curvature radius was studied with and without space charge has been done using a singly charge argon ion trajectories. Firstly, for a concave meniscus with 3.5 mm curvature radius, the influence of the current density on the ion beam shape was investigated. Furthermore, influence of the extraction voltage applied to the extraction electrode on the ion beam envelope was studied. Finally, the influence of the extraction gap width on the ion beam envelope was also studied.